TY - JOUR
T1 - A Review on Coupled Bulk Acoustic Wave MEMS Resonators
AU - Wang, Linlin
AU - Wang, Chen
AU - Wang, Yuan
AU - Quan, Aojie
AU - Keshavarz, Masoumeh
AU - Madeira, Bernardo Pereira
AU - Zhang, Hemin
AU - Wang, Chenxi
AU - Kraft, Michael
N1 - Publisher Copyright:
© 2022 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https:// creativecommons.org/licenses/by/ 4.0/).
PY - 2022/5/1
Y1 - 2022/5/1
N2 - With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed, including the coupling theory, the actuation and sensing theory, the transduction mechanism, and the applications. BAW MEMS resonators normally exhibit two types of vibration modes: lateral (in-plane) modes and flexural (out-of-plane) modes. Compared to flexural modes, lateral modes exhibit a higher stiffness with a higher operating frequency, resulting in a lower internal loss. Also, the lateral mode has a higher Q factor, as the fluid damping imposes less influence on the in-plane motion. The coupled BAW MEMS resonators in these two vibration modes are investigated in this work and their applications for sensing, timing, and frequency reference are also presented.
AB - With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed, including the coupling theory, the actuation and sensing theory, the transduction mechanism, and the applications. BAW MEMS resonators normally exhibit two types of vibration modes: lateral (in-plane) modes and flexural (out-of-plane) modes. Compared to flexural modes, lateral modes exhibit a higher stiffness with a higher operating frequency, resulting in a lower internal loss. Also, the lateral mode has a higher Q factor, as the fluid damping imposes less influence on the in-plane motion. The coupled BAW MEMS resonators in these two vibration modes are investigated in this work and their applications for sensing, timing, and frequency reference are also presented.
KW - Micro-Electro-Mechanical System (MEMS)
KW - bulk acoustic wave (BAW)
KW - coupled resonators
KW - sensing theory
KW - transduction mechanism
UR - http://www.scopus.com/inward/record.url?scp=85130220153&partnerID=8YFLogxK
U2 - 10.3390/s22103857
DO - 10.3390/s22103857
M3 - 文献综述
C2 - 35632263
AN - SCOPUS:85130220153
SN - 1424-8220
VL - 22
JO - Sensors
JF - Sensors
IS - 10
M1 - 3857
ER -