@inproceedings{749cd37294f84ec89a8b48477f5d8c56,
title = "A prediction algorithm for the smoothing process of large-aperture optical components with complex periodic middle-spatial frequency errors",
abstract = "Due to the complexity and inhomogeneity of the distribution of the middle-spatial frequency errors (MSFE), the existing theoretical models cannot realize the manufacturability prediction of the smoothing process for the MSFE on the largeaperture optical components. Therefore, based on the parameterized time-domain smoothing model and the idea of regional division, a prediction algorithm suitable for the smoothing process of the MSFE in complex periods is proposed in this paper. The relevant verifiable experiments are carried out. The prediction results are in good agreement with the real data, which indicates that the prediction algorithm proposed in this paper can be applied to predict the smoothing process of the MSFE of large-aperture optical components and guide the polishing process.",
keywords = "Complex periodic, Middle-spatial frequency errors, Prediction, Smoothing",
author = "Jing Hou and Liu, {Shi Wei} and Chen, {Xian Hua} and Zhang, {Qing Hua} and Jian Wang and Bo Zhong and Deng, {Wen Hui}",
note = "Publisher Copyright: {\textcopyright} COPYRIGHT SPIE.; 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies 2021 ; Conference date: 14-06-2021 Through 17-06-2021",
year = "2021",
doi = "10.1117/12.2605254",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Mingbo Pu and Marsh, {John H.} and Bin Fan and Yifan Dai and Xiong Li and Xiangang Luo",
booktitle = "10th International Symposium on Advanced Optical Manufacturing and Testing Technologies",
}