TY - GEN
T1 - A Mode Localized Force Transducer with Reduced Feedthrough via 1:2 Internal Resonance Actuation
AU - Chen, Jianlin
AU - Zhang, Hemin
AU - Tsukamoto, Takashiro
AU - Kraft, Michael
AU - Tanaka, Shuji
N1 - Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - This paper, for the first time, reports that the feedthrough signal can be significantly diminished, and the effective linear sensing range can be enhanced in a triple mass coupled resonator with 1:2 internal resonance (IR) actuation. Thanks to the unique structural design and flexible electrostatic tuning, the frequencies of the second and third modes can be independently tuned to be twice as that of the first mode. Nonlinear mode interaction between the first and second modes occurred when the first mode was driven in the nonlinear Duffing regime. The feedthrough signal by direct actuation (DA) was about 6.2% of the driving signal, while that by IR was almost independent from the driving signal, i.e. no-feedthrough. The experimental result showed the stiffness sensitivity of the second mode under DA was 1230, however the linear region of stiffness, ?k/k, was only 0.8%. On the contrary, the same sensitivity could be obtained by the IR actuation with a wider linear region as high as 2.2%. The stability of both frequency and amplitude ratio were also enhanced under IR actuation compared with DA driving.
AB - This paper, for the first time, reports that the feedthrough signal can be significantly diminished, and the effective linear sensing range can be enhanced in a triple mass coupled resonator with 1:2 internal resonance (IR) actuation. Thanks to the unique structural design and flexible electrostatic tuning, the frequencies of the second and third modes can be independently tuned to be twice as that of the first mode. Nonlinear mode interaction between the first and second modes occurred when the first mode was driven in the nonlinear Duffing regime. The feedthrough signal by direct actuation (DA) was about 6.2% of the driving signal, while that by IR was almost independent from the driving signal, i.e. no-feedthrough. The experimental result showed the stiffness sensitivity of the second mode under DA was 1230, however the linear region of stiffness, ?k/k, was only 0.8%. On the contrary, the same sensitivity could be obtained by the IR actuation with a wider linear region as high as 2.2%. The stability of both frequency and amplitude ratio were also enhanced under IR actuation compared with DA driving.
KW - Feedthrough signal
KW - Internal resonance
KW - Mode-localized resonator
KW - Triple mass resonator
UR - http://www.scopus.com/inward/record.url?scp=85126392644&partnerID=8YFLogxK
U2 - 10.1109/MEMS51670.2022.9699648
DO - 10.1109/MEMS51670.2022.9699648
M3 - 会议稿件
AN - SCOPUS:85126392644
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 743
EP - 746
BT - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Y2 - 9 January 2022 through 13 January 2022
ER -