A mode-localized accelerometer based on three degree-of-freedom weakly coupled resonator

Hao Kang, Jing Yang, Jiming Zhong, Heming Zhang, Honglong Chang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

24 Scopus citations

Abstract

This paper reports a micromachined accelerometer using a three degree-of-freedom (3-DoF) weakly coupled resonator (WCR) based on the phenomenon of mode localization. When acceleration acts on the proof masses, the stiffness imbalance between the two outer resonators will incur the mode localization and cause the shift of amplitude ratio. The measured amplitude ratio sensitivity of 7,263,30 ppm/g is 726 times higher than the frequency sensitivity of 10,00 ppm/g. Furthermore, the sensitivity of the 3-DoF WCR accelerometer is improved by 349% compared with the 2-DoF WCR accelerometer.

Original languageEnglish
Title of host publicationIEEE SENSORS 2017 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-3
Number of pages3
ISBN (Electronic)9781509010127
DOIs
StatePublished - 21 Dec 2017
Event16th IEEE SENSORS Conference, ICSENS 2017 - Glasgow, United Kingdom
Duration: 30 Oct 20171 Nov 2017

Publication series

NameProceedings of IEEE Sensors
Volume2017-December
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference16th IEEE SENSORS Conference, ICSENS 2017
Country/TerritoryUnited Kingdom
CityGlasgow
Period30/10/171/11/17

Keywords

  • mode localization
  • resonant accelerometer
  • three degree-of-freedom
  • weakly coupled resonator

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