A micro resonant electrometer with 9-electron charge resolution in room temperature

Jing Yang, Hao Kang, Honglon Chang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

26 Scopus citations

Abstract

This paper reports a mode-localized resonant electrometer with 9-electron charge resolution in room temperature. To the best knowledge of the authors, it is the highest resolution level for MEMS resonant electrometers. It uses a 3 degree-of-freedom (DoF) weakly coupled resonators (WCRs) as sensing element, then input charge causes stiffness perturbation to one resonator and leads to a drastic change of the mode shape owing to the mode localization phenomenon. Under the closed-loop test, the relative sensitivity based on the amplitude ratios (2280858ppm) is -900 times higher than that of the frequency (2539ppm) with the input charge of 380/C. The resolution of the electrometer is 9.21 e/√Hz. Compared to the state-of-the-art MEMS resonant electrometer (5250e/√Hz) [1], the resolution is improved by nearly three orders of magnitude.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages67-70
Number of pages4
ISBN (Electronic)9781538647820
DOIs
StatePublished - 24 Apr 2018
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 21 Jan 201825 Jan 2018

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Conference

Conference31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/TerritoryUnited Kingdom
CityBelfast
Period21/01/1825/01/18

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