A micro resonant electrometer with 9-electron charge resolution in room temperature

Jing Yang; Hao Kang; Honglon Chang

doi:10.1109/MEMSYS.2018.8346484

A micro resonant electrometer with 9-electron charge resolution in room temperature

Jing Yang, Hao Kang, Honglon Chang

School of Mechanical Engineering

Northwestern Polytechnical University Xian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

26 Scopus citations

Abstract

This paper reports a mode-localized resonant electrometer with 9-electron charge resolution in room temperature. To the best knowledge of the authors, it is the highest resolution level for MEMS resonant electrometers. It uses a 3 degree-of-freedom (DoF) weakly coupled resonators (WCRs) as sensing element, then input charge causes stiffness perturbation to one resonator and leads to a drastic change of the mode shape owing to the mode localization phenomenon. Under the closed-loop test, the relative sensitivity based on the amplitude ratios (2280858ppm) is -900 times higher than that of the frequency (2539ppm) with the input charge of 380/C. The resolution of the electrometer is 9.21 e/√Hz. Compared to the state-of-the-art MEMS resonant electrometer (5250e/√Hz) [1], the resolution is improved by nearly three orders of magnitude.

Original language	English
Title of host publication	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	67-70
Number of pages	4
ISBN (Electronic)	9781538647820
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346484
State	Published - 24 Apr 2018
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2018-January
ISSN (Print)	1084-6999

Conference

Conference	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	21/01/18 → 25/01/18

Access to Document

10.1109/MEMSYS.2018.8346484

Cite this

Yang, J., Kang, H., & Chang, H. (2018). A micro resonant electrometer with 9-electron charge resolution in room temperature. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 67-70). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346484

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abstract = "This paper reports a mode-localized resonant electrometer with 9-electron charge resolution in room temperature. To the best knowledge of the authors, it is the highest resolution level for MEMS resonant electrometers. It uses a 3 degree-of-freedom (DoF) weakly coupled resonators (WCRs) as sensing element, then input charge causes stiffness perturbation to one resonator and leads to a drastic change of the mode shape owing to the mode localization phenomenon. Under the closed-loop test, the relative sensitivity based on the amplitude ratios (2280858ppm) is -900 times higher than that of the frequency (2539ppm) with the input charge of 380/C. The resolution of the electrometer is 9.21 e/√Hz. Compared to the state-of-the-art MEMS resonant electrometer (5250e/√Hz) [1], the resolution is improved by nearly three orders of magnitude.",

author = "Jing Yang and Hao Kang and Honglon Chang",

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Yang, J, Kang, H & Chang, H 2018, A micro resonant electrometer with 9-electron charge resolution in room temperature. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 67-70, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 21/01/18. https://doi.org/10.1109/MEMSYS.2018.8346484

A micro resonant electrometer with 9-electron charge resolution in room temperature. / Yang, Jing; Kang, Hao; Chang, Honglon.
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 67-70 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - This paper reports a mode-localized resonant electrometer with 9-electron charge resolution in room temperature. To the best knowledge of the authors, it is the highest resolution level for MEMS resonant electrometers. It uses a 3 degree-of-freedom (DoF) weakly coupled resonators (WCRs) as sensing element, then input charge causes stiffness perturbation to one resonator and leads to a drastic change of the mode shape owing to the mode localization phenomenon. Under the closed-loop test, the relative sensitivity based on the amplitude ratios (2280858ppm) is -900 times higher than that of the frequency (2539ppm) with the input charge of 380/C. The resolution of the electrometer is 9.21 e/√Hz. Compared to the state-of-the-art MEMS resonant electrometer (5250e/√Hz) [1], the resolution is improved by nearly three orders of magnitude.

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A micro resonant electrometer with 9-electron charge resolution in room temperature

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