A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators

Hemin Zhang; Weizheng Yuan; Jie Huang; Boyang Li; Honglong Chang

doi:10.1109/MEMSYS.2016.7421564

A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators

Hemin Zhang, Weizheng Yuan, Jie Huang, Boyang Li, Honglong Chang

School of Mechanical Engineering

Northwestern Polytechnical University Xian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

17 Scopus citations

Abstract

This paper reports a high-sensitive MEMS resonant electrometer based on mode localization of two weakly coupled resonators (WCRs). In the electrometer, the small electric charge input will cause a stiffness perturbation to one resonator of the WCRs, leading to a drastic change of the mode shape owing to the mode localization phenomena. By measuring the shift of the amplitude ratio, the small charge fluctuation can be accurately sensed. The experimental results show that with a charge input of 144fC the relative sensitivity based on the amplitude ratio is 663751ppm, which is -2341 times higher than that of the frequency (283.56ppm).

Original language	English
Title of host publication	MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	87-90
Number of pages	4
ISBN (Electronic)	9781509019731
DOIs	https://doi.org/10.1109/MEMSYS.2016.7421564
State	Published - 26 Feb 2016
Event	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2016-February
ISSN (Print)	1084-6999

Conference

Conference	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Country/Territory	China
City	Shanghai
Period	24/01/16 → 28/01/16

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10.1109/MEMSYS.2016.7421564

Cite this

Zhang, H., Yuan, W., Huang, J., Li, B., & Chang, H. (2016). A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (pp. 87-90). Article 7421564 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2016.7421564

Zhang, Hemin ; Yuan, Weizheng ; Huang, Jie et al. / A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators. MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 87-90 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{177645bd48e34270b4039fa46afadbce,

title = "A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators",

abstract = "This paper reports a high-sensitive MEMS resonant electrometer based on mode localization of two weakly coupled resonators (WCRs). In the electrometer, the small electric charge input will cause a stiffness perturbation to one resonator of the WCRs, leading to a drastic change of the mode shape owing to the mode localization phenomena. By measuring the shift of the amplitude ratio, the small charge fluctuation can be accurately sensed. The experimental results show that with a charge input of 144fC the relative sensitivity based on the amplitude ratio is 663751ppm, which is -2341 times higher than that of the frequency (283.56ppm).",

author = "Hemin Zhang and Weizheng Yuan and Jie Huang and Boyang Li and Honglong Chang",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 ; Conference date: 24-01-2016 Through 28-01-2016",

year = "2016",

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doi = "10.1109/MEMSYS.2016.7421564",

language = "英语",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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Zhang, H , Yuan, W, Huang, J, Li, B & Chang, H 2016, A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators. in MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems., 7421564, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2016-February, Institute of Electrical and Electronics Engineers Inc., pp. 87-90, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421564

A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators. / Zhang, Hemin ; Yuan, Weizheng; Huang, Jie et al.
MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. p. 87-90 7421564 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators

AU - Zhang, Hemin

AU - Yuan, Weizheng

AU - Huang, Jie

AU - Li, Boyang

AU - Chang, Honglong

PY - 2016/2/26

Y1 - 2016/2/26

N2 - This paper reports a high-sensitive MEMS resonant electrometer based on mode localization of two weakly coupled resonators (WCRs). In the electrometer, the small electric charge input will cause a stiffness perturbation to one resonator of the WCRs, leading to a drastic change of the mode shape owing to the mode localization phenomena. By measuring the shift of the amplitude ratio, the small charge fluctuation can be accurately sensed. The experimental results show that with a charge input of 144fC the relative sensitivity based on the amplitude ratio is 663751ppm, which is -2341 times higher than that of the frequency (283.56ppm).

AB - This paper reports a high-sensitive MEMS resonant electrometer based on mode localization of two weakly coupled resonators (WCRs). In the electrometer, the small electric charge input will cause a stiffness perturbation to one resonator of the WCRs, leading to a drastic change of the mode shape owing to the mode localization phenomena. By measuring the shift of the amplitude ratio, the small charge fluctuation can be accurately sensed. The experimental results show that with a charge input of 144fC the relative sensitivity based on the amplitude ratio is 663751ppm, which is -2341 times higher than that of the frequency (283.56ppm).

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016

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Zhang H , Yuan W, Huang J, Li B, Chang H. A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2016. p. 87-90. 7421564. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2016.7421564

A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators

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