A High-Resolution Mass Sensor Based on Two Thermal Piezoresistive Self-Sustained Resonators Coupled via An Arching Membrane

Aojie Quan; Hemin Zhang; Chen Wang; Jan Willem Burssens; Linlin Wang; Chenxi Wang; Michel De Cooman; Michael Kraft

doi:10.1109/MEMS51670.2022.9699769

A High-Resolution Mass Sensor Based on Two Thermal Piezoresistive Self-Sustained Resonators Coupled via An Arching Membrane

Aojie Quan, Hemin Zhang, Chen Wang, Jan Willem Burssens, Linlin Wang, Chenxi Wang, Michel De Cooman, Michael Kraft

KU Leuven

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper reports a mode-localized mass sensor based on two thermal-piezoresistive self-sustained resonators coupled by an arching mechanical membrane coupler. Sensitivities of the mass sensors based on coupled resonators with amplitude ratio readout depends on a low coupling factor. To lower the coupling stiffness between the two thermal-piezoresistive coupling resonators, an arching membrane coupler with thickness between 1 m to 8 m was fabricated underneath the coupling area of the two resonators, based on the aspect ratio dependent etching (ARDE) effect. The experimental results indicated that the sensitivity and resolution of the newly designed mass sensor with the arching membrane coupler were increased by 20 and 10 times, respectively, compared to the state-of-the-art.

Original language	English
Title of host publication	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	856-859
Number of pages	4
ISBN (Electronic)	9781665409117
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699769
State	Published - 2022
Externally published	Yes
Event	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 9 Jan 2022 → 13 Jan 2022

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2022-January
ISSN (Print)	1084-6999

Conference

Conference	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	9/01/22 → 13/01/22

Keywords

aspect ratio dependent etching effect
Mass sensor
mode localization
self-oscillation
thermal-piezoresistive

Access to Document

10.1109/MEMS51670.2022.9699769

Cite this

Quan, A., Zhang, H., Wang, C., Burssens, J. W., Wang, L., Wang, C., Cooman, M. D., & Kraft, M. (2022). A High-Resolution Mass Sensor Based on Two Thermal Piezoresistive Self-Sustained Resonators Coupled via An Arching Membrane. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 856-859). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS51670.2022.9699769

Quan, Aojie ; Zhang, Hemin ; Wang, Chen et al. / A High-Resolution Mass Sensor Based on Two Thermal Piezoresistive Self-Sustained Resonators Coupled via An Arching Membrane. 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. pp. 856-859 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "A High-Resolution Mass Sensor Based on Two Thermal Piezoresistive Self-Sustained Resonators Coupled via An Arching Membrane",

abstract = "This paper reports a mode-localized mass sensor based on two thermal-piezoresistive self-sustained resonators coupled by an arching mechanical membrane coupler. Sensitivities of the mass sensors based on coupled resonators with amplitude ratio readout depends on a low coupling factor. To lower the coupling stiffness between the two thermal-piezoresistive coupling resonators, an arching membrane coupler with thickness between 1 m to 8 m was fabricated underneath the coupling area of the two resonators, based on the aspect ratio dependent etching (ARDE) effect. The experimental results indicated that the sensitivity and resolution of the newly designed mass sensor with the arching membrane coupler were increased by 20 and 10 times, respectively, compared to the state-of-the-art.",

keywords = "aspect ratio dependent etching effect, Mass sensor, mode localization, self-oscillation, thermal-piezoresistive",

author = "Aojie Quan and Hemin Zhang and Chen Wang and Burssens, {Jan Willem} and Linlin Wang and Chenxi Wang and Cooman, {Michel De} and Michael Kraft",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

year = "2022",

doi = "10.1109/MEMS51670.2022.9699769",

language = "英语",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "856--859",

booktitle = "35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022",

}

Quan, A, Zhang, H, Wang, C, Burssens, JW, Wang, L, Wang, C, Cooman, MD & Kraft, M 2022, A High-Resolution Mass Sensor Based on Two Thermal Piezoresistive Self-Sustained Resonators Coupled via An Arching Membrane. in 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2022-January, Institute of Electrical and Electronics Engineers Inc., pp. 856-859, 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 9/01/22. https://doi.org/10.1109/MEMS51670.2022.9699769

A High-Resolution Mass Sensor Based on Two Thermal Piezoresistive Self-Sustained Resonators Coupled via An Arching Membrane. / Quan, Aojie; Zhang, Hemin; Wang, Chen et al.
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. p. 856-859 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Quan, Aojie

AU - Zhang, Hemin

AU - Wang, Chen

AU - Burssens, Jan Willem

AU - Wang, Linlin

AU - Wang, Chenxi

AU - Cooman, Michel De

AU - Kraft, Michael

PY - 2022

Y1 - 2022

N2 - This paper reports a mode-localized mass sensor based on two thermal-piezoresistive self-sustained resonators coupled by an arching mechanical membrane coupler. Sensitivities of the mass sensors based on coupled resonators with amplitude ratio readout depends on a low coupling factor. To lower the coupling stiffness between the two thermal-piezoresistive coupling resonators, an arching membrane coupler with thickness between 1 m to 8 m was fabricated underneath the coupling area of the two resonators, based on the aspect ratio dependent etching (ARDE) effect. The experimental results indicated that the sensitivity and resolution of the newly designed mass sensor with the arching membrane coupler were increased by 20 and 10 times, respectively, compared to the state-of-the-art.

AB - This paper reports a mode-localized mass sensor based on two thermal-piezoresistive self-sustained resonators coupled by an arching mechanical membrane coupler. Sensitivities of the mass sensors based on coupled resonators with amplitude ratio readout depends on a low coupling factor. To lower the coupling stiffness between the two thermal-piezoresistive coupling resonators, an arching membrane coupler with thickness between 1 m to 8 m was fabricated underneath the coupling area of the two resonators, based on the aspect ratio dependent etching (ARDE) effect. The experimental results indicated that the sensitivity and resolution of the newly designed mass sensor with the arching membrane coupler were increased by 20 and 10 times, respectively, compared to the state-of-the-art.

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KW - Mass sensor

KW - mode localization

KW - self-oscillation

KW - thermal-piezoresistive

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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ER -

Quan A, Zhang H, Wang C, Burssens JW, Wang L, Wang C et al. A High-Resolution Mass Sensor Based on Two Thermal Piezoresistive Self-Sustained Resonators Coupled via An Arching Membrane. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc. 2022. p. 856-859. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS51670.2022.9699769

A High-Resolution Mass Sensor Based on Two Thermal Piezoresistive Self-Sustained Resonators Coupled via An Arching Membrane

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