@inproceedings{1766c63b6f25487696f7996e9be62610,
title = "A Fast-Startup Self-Sustained Thermal-Piezoresistive Oscillaror with >106Effective Quality Factor in the Air",
abstract = "This paper reports a self-sustained thermal-actuation piezoresistive-detection oscillator with boosted startup time and quality (Q) factor in the order of a million. A high Q-factor is an essential property for resonant sensors to achieve a high signal to noise ratio. It is demonstrated that the thermal-piezoresistive effect can increase the Q-factor. We obtained an effective Q-factor up to 1.06 million operating in air with direct-current induced self-oscillation. Furthermore, a fast startup time is achieved when stimulating the self-sustained oscillator with a current just below the threshold of self-oscillation requirements. The experimental results show that the startup time can be decreased by a factor of 3 by initially thermally pre-expanding the actuating nanobeam compared to a cold-startup condition.",
keywords = "MEMS, Oscillator, quality factor, self-oscillation, thermal-piezoresistive",
author = "Hemin Zhang and Aojie Quan and Chenxi Wang and Linlin Wang and Chen Wang and Michael Kraft",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",
year = "2022",
doi = "10.1109/MEMS51670.2022.9699711",
language = "英语",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "142--145",
booktitle = "35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022",
}