5-Bit Spiral Distributed RF MEMS Phase Shifter

Wenchao Tian; Yuting Zhang; Mengjuan Li; Zhongliang Xie; Wenhua Li

doi:10.1109/NANO46743.2019.8993952

5-Bit Spiral Distributed RF MEMS Phase Shifter

Wenchao Tian, Yuting Zhang, Mengjuan Li, Zhongliang Xie, Wenhua Li

Xidian University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

5 Scopus citations

Abstract

A new spiral distributed radio frequency micro-electromechanical system (RF MEMS) phase shifter which uses 31 MEMS switches to achieve 5-bit phase shifts is designed in this paper. The area of the phase shifter is 2.6×2.6 mm². The simulation results of phase shift are 11.43°, 23.04°, 44.53°, 91.73° and 182.65° when the central operating frequency is 40 GHz. The deviations of the design target are 0.18°, 0.54°, 0.47°, 1.73° and 2.65°, respectively. Insertion loss and return loss are -15.1092 dB/-8.9120 dB, -14.2271 dB/-9.9053 dB, -15.1092 dB/-8.9120 dB, -13.2439 dB/-11.6679 dB and -16.3046 dB/-10.2057dB, respectively. The simulation results and phase shift accuracy of the 31 phase shifts of RF MEMS phase shifter are given, and the deviation of the design target is within 3.72°. It realizes the requirements of RF MEMS phased array system. This phase shifter has the advantages of high frequency, small size, high precision, low loss and low cost.

Original language	English
Title of host publication	19th IEEE International Conference on Nanotechnology, NANO 2019
Publisher	IEEE Computer Society
Pages	94-98
Number of pages	5
ISBN (Electronic)	9781728128917
DOIs	https://doi.org/10.1109/NANO46743.2019.8993952
State	Published - Jul 2019
Externally published	Yes
Event	19th IEEE International Conference on Nanotechnology, NANO 2019 - Macau, China Duration: 22 Jul 2019 → 26 Jul 2019

Publication series

Name	Proceedings of the IEEE Conference on Nanotechnology
Volume	2019-July
ISSN (Print)	1944-9399
ISSN (Electronic)	1944-9380

Conference

Conference	19th IEEE International Conference on Nanotechnology, NANO 2019
Country/Territory	China
City	Macau
Period	22/07/19 → 26/07/19

Access to Document

10.1109/NANO46743.2019.8993952

Cite this

@inproceedings{7e5b6090b30d48658a10f87c861d8986,

title = "5-Bit Spiral Distributed RF MEMS Phase Shifter",

abstract = "A new spiral distributed radio frequency micro-electromechanical system (RF MEMS) phase shifter which uses 31 MEMS switches to achieve 5-bit phase shifts is designed in this paper. The area of the phase shifter is 2.6×2.6 mm2. The simulation results of phase shift are 11.43°, 23.04°, 44.53°, 91.73° and 182.65° when the central operating frequency is 40 GHz. The deviations of the design target are 0.18°, 0.54°, 0.47°, 1.73° and 2.65°, respectively. Insertion loss and return loss are -15.1092 dB/-8.9120 dB, -14.2271 dB/-9.9053 dB, -15.1092 dB/-8.9120 dB, -13.2439 dB/-11.6679 dB and -16.3046 dB/-10.2057dB, respectively. The simulation results and phase shift accuracy of the 31 phase shifts of RF MEMS phase shifter are given, and the deviation of the design target is within 3.72°. It realizes the requirements of RF MEMS phased array system. This phase shifter has the advantages of high frequency, small size, high precision, low loss and low cost.",

author = "Wenchao Tian and Yuting Zhang and Mengjuan Li and Zhongliang Xie and Wenhua Li",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 19th IEEE International Conference on Nanotechnology, NANO 2019 ; Conference date: 22-07-2019 Through 26-07-2019",

year = "2019",

month = jul,

doi = "10.1109/NANO46743.2019.8993952",

language = "英语",

series = "Proceedings of the IEEE Conference on Nanotechnology",

publisher = "IEEE Computer Society",

pages = "94--98",

booktitle = "19th IEEE International Conference on Nanotechnology, NANO 2019",

}

Tian, W, Zhang, Y, Li, M, Xie, Z & Li, W 2019, 5-Bit Spiral Distributed RF MEMS Phase Shifter. in 19th IEEE International Conference on Nanotechnology, NANO 2019., 8993952, Proceedings of the IEEE Conference on Nanotechnology, vol. 2019-July, IEEE Computer Society, pp. 94-98, 19th IEEE International Conference on Nanotechnology, NANO 2019, Macau, China, 22/07/19. https://doi.org/10.1109/NANO46743.2019.8993952

5-Bit Spiral Distributed RF MEMS Phase Shifter. / Tian, Wenchao; Zhang, Yuting; Li, Mengjuan et al.
19th IEEE International Conference on Nanotechnology, NANO 2019. IEEE Computer Society, 2019. p. 94-98 8993952 (Proceedings of the IEEE Conference on Nanotechnology; Vol. 2019-July).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - A new spiral distributed radio frequency micro-electromechanical system (RF MEMS) phase shifter which uses 31 MEMS switches to achieve 5-bit phase shifts is designed in this paper. The area of the phase shifter is 2.6×2.6 mm2. The simulation results of phase shift are 11.43°, 23.04°, 44.53°, 91.73° and 182.65° when the central operating frequency is 40 GHz. The deviations of the design target are 0.18°, 0.54°, 0.47°, 1.73° and 2.65°, respectively. Insertion loss and return loss are -15.1092 dB/-8.9120 dB, -14.2271 dB/-9.9053 dB, -15.1092 dB/-8.9120 dB, -13.2439 dB/-11.6679 dB and -16.3046 dB/-10.2057dB, respectively. The simulation results and phase shift accuracy of the 31 phase shifts of RF MEMS phase shifter are given, and the deviation of the design target is within 3.72°. It realizes the requirements of RF MEMS phased array system. This phase shifter has the advantages of high frequency, small size, high precision, low loss and low cost.

AB - A new spiral distributed radio frequency micro-electromechanical system (RF MEMS) phase shifter which uses 31 MEMS switches to achieve 5-bit phase shifts is designed in this paper. The area of the phase shifter is 2.6×2.6 mm2. The simulation results of phase shift are 11.43°, 23.04°, 44.53°, 91.73° and 182.65° when the central operating frequency is 40 GHz. The deviations of the design target are 0.18°, 0.54°, 0.47°, 1.73° and 2.65°, respectively. Insertion loss and return loss are -15.1092 dB/-8.9120 dB, -14.2271 dB/-9.9053 dB, -15.1092 dB/-8.9120 dB, -13.2439 dB/-11.6679 dB and -16.3046 dB/-10.2057dB, respectively. The simulation results and phase shift accuracy of the 31 phase shifts of RF MEMS phase shifter are given, and the deviation of the design target is within 3.72°. It realizes the requirements of RF MEMS phased array system. This phase shifter has the advantages of high frequency, small size, high precision, low loss and low cost.

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T2 - 19th IEEE International Conference on Nanotechnology, NANO 2019

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ER -

5-Bit Spiral Distributed RF MEMS Phase Shifter

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