Structural element library based conceptual design methodology of MEMS

A new methodology for MEMS conceptual design was introduced to assist the initial stages of design exploration. The methodology utilized past successful MEMS designs and sub-assemblies as building blocks stored in an indexed library. During conceptual design for exploring new MEMS configurations, interrelated elements can be retrieved automatically from the library by behavior matching, and then elements' function and structure of components and the device can be further considered and determined by the designers. Design of shear stress sensor was taken as an example to successfully testify the ability to obtain new designs with high efficiency.