Special issue: Functional materials by atomic layer deposition

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@article{ae51126fc4c442329457a64c5abfb925,

title = "Special issue: Functional materials by atomic layer deposition",

author = "Mato Knez and Yong Qin",

year = "2013",

month = jun,

doi = "10.1002/cvde.201302001",

language = "英语",

volume = "19",

pages = "80--81",

journal = "Chemical Vapor Deposition",

issn = "0948-1907",

publisher = "Wiley-VCH Verlag",

number = "4-6",

}

TY - JOUR

T1 - Special issue

T2 - Functional materials by atomic layer deposition

AU - Knez, Mato

AU - Qin, Yong

PY - 2013/6

Y1 - 2013/6

UR - https://www.scopus.com/pages/publications/84879235961

U2 - 10.1002/cvde.201302001

DO - 10.1002/cvde.201302001

M3 - 社论

AN - SCOPUS:84879235961

SN - 0948-1907

VL - 19

SP - 80

EP - 81

JO - Chemical Vapor Deposition

JF - Chemical Vapor Deposition

IS - 4-6

ER -