Research progress on thermal wall shear stress sensors

Baoyun Sun; Binghe Ma; Jinjun Deng; Chengyu Jiang

doi:10.11729/syltlx20170022

Research progress on thermal wall shear stress sensors

Baoyun Sun
, Binghe Ma
, Jinjun Deng
, Chengyu Jiang

微电子学院

Northwestern Polytechnical University Xian

科研成果: 期刊稿件 › 文献综述 › 同行评审

4 引用（Scopus）

摘要

Micro Electro-Mechanical Systems (MEMS)-based shear stress sensors provide a significant method in wall shear stress measurement. In this paper, the research progress of thermal wall shear sensors is introduced. And the sensing principle, device structure, fabrication processes, and performance test of the silicon-based and flexible polymer-based thermal wall shear stress sensors are analyzed.

源语言	英语
页（从-至）	26-33 and 43
期刊	Shiyan Liuti Lixue/Journal of Experiments in Fluid Mechanics
卷	31
期	2
DOI	https://doi.org/10.11729/syltlx20170022
出版状态	已出版 - 1 4月 2017

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10.11729/syltlx20170022

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title = "Research progress on thermal wall shear stress sensors",

abstract = "Micro Electro-Mechanical Systems (MEMS)-based shear stress sensors provide a significant method in wall shear stress measurement. In this paper, the research progress of thermal wall shear sensors is introduced. And the sensing principle, device structure, fabrication processes, and performance test of the silicon-based and flexible polymer-based thermal wall shear stress sensors are analyzed.",

keywords = "Measurement technology, MEMS, Micro sensor, Thermal, Wall shear stress",

author = "Baoyun Sun and Binghe Ma and Jinjun Deng and Chengyu Jiang",

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T1 - Research progress on thermal wall shear stress sensors

AU - Sun, Baoyun

AU - Ma, Binghe

AU - Deng, Jinjun

AU - Jiang, Chengyu

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Y1 - 2017/4/1

N2 - Micro Electro-Mechanical Systems (MEMS)-based shear stress sensors provide a significant method in wall shear stress measurement. In this paper, the research progress of thermal wall shear sensors is introduced. And the sensing principle, device structure, fabrication processes, and performance test of the silicon-based and flexible polymer-based thermal wall shear stress sensors are analyzed.

AB - Micro Electro-Mechanical Systems (MEMS)-based shear stress sensors provide a significant method in wall shear stress measurement. In this paper, the research progress of thermal wall shear sensors is introduced. And the sensing principle, device structure, fabrication processes, and performance test of the silicon-based and flexible polymer-based thermal wall shear stress sensors are analyzed.

KW - Measurement technology

KW - MEMS

KW - Micro sensor

KW - Thermal

KW - Wall shear stress

UR - https://www.scopus.com/pages/publications/85020450237

U2 - 10.11729/syltlx20170022

DO - 10.11729/syltlx20170022

M3 - 文献综述

AN - SCOPUS:85020450237

SN - 1672-9897

VL - 31

SP - 26-33 and 43

JO - Shiyan Liuti Lixue/Journal of Experiments in Fluid Mechanics

JF - Shiyan Liuti Lixue/Journal of Experiments in Fluid Mechanics

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ER -

Research progress on thermal wall shear stress sensors

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