Properties of ultrafine SnOx thin film made by plasma polymerization

Yong Zhang; Kun Lin Zhou; Wei Min Cao; Wei Min Liu

Properties of ultrafine SnOx thin film made by plasma polymerization

Yong Zhang
, Kun Lin Zhou
, Wei Min Cao
, Wei Min Liu

CAS - Chengdu Institute of Organic Chemistry
CAS - Lanzhou Institute of Chemical Physics

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

Ultrafine SnOx thin films were prepared from tetrabutyltin by RF glow discharge polymerization. Annealing behaviour of films under air and gas-sensitive property were investigated. The ultrafine SnOx thin film with average particle size of 6nm exhibited a high sensitivity of 30 to 500ppm EtOH at 200°C.

源语言	英语
页（从-至）	493-494
页数	2
期刊	Chinese Chemical Letters
卷	7
期	5
出版状态	已出版 - 1996
已对外发布	是

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title = "Properties of ultrafine SnOx thin film made by plasma polymerization",

abstract = "Ultrafine SnOx thin films were prepared from tetrabutyltin by RF glow discharge polymerization. Annealing behaviour of films under air and gas-sensitive property were investigated. The ultrafine SnOx thin film with average particle size of 6nm exhibited a high sensitivity of 30 to 500ppm EtOH at 200°C.",

author = "Yong Zhang and Zhou, \{Kun Lin\} and Cao, \{Wei Min\} and Liu, \{Wei Min\}",

year = "1996",

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AU - Zhang, Yong

AU - Zhou, Kun Lin

AU - Cao, Wei Min

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N2 - Ultrafine SnOx thin films were prepared from tetrabutyltin by RF glow discharge polymerization. Annealing behaviour of films under air and gas-sensitive property were investigated. The ultrafine SnOx thin film with average particle size of 6nm exhibited a high sensitivity of 30 to 500ppm EtOH at 200°C.

AB - Ultrafine SnOx thin films were prepared from tetrabutyltin by RF glow discharge polymerization. Annealing behaviour of films under air and gas-sensitive property were investigated. The ultrafine SnOx thin film with average particle size of 6nm exhibited a high sensitivity of 30 to 500ppm EtOH at 200°C.

UR - https://www.scopus.com/pages/publications/3142567291

M3 - 文章

AN - SCOPUS:3142567291

SN - 1001-8417

VL - 7

SP - 493

EP - 494

JO - Chinese Chemical Letters

JF - Chinese Chemical Letters

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Properties of ultrafine SnOx thin film made by plasma polymerization

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