Patterning single-layer materials by electrical breakdown using atomic force microscopy

Yajie Yang; Jiajia Lu; Yanbo Xie; Libing Duan

doi:10.1063/10.0023848

Patterning single-layer materials by electrical breakdown using atomic force microscopy

Yajie Yang
, Jiajia Lu
, Yanbo Xie
, Libing Duan

航空学院

Northwestern Polytechnical University Xian

科研成果: 期刊稿件 › 文章 › 同行评审

1 引用（Scopus）

摘要

ARTICLE HIGHLIGHTS HIGHLIGHTS • Successful patterning of 2D materials by electrical breakdown. • A maskless, pollution-free method for patterning various 2D materials. • Nanopattern size is characterized by number of voltage scanning cycles.

源语言	英语
期刊论文编号	013008
期刊	Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering
卷	7
期	1
DOI	https://doi.org/10.1063/10.0023848
出版状态	已出版 - 1 3月 2024

访问文件

10.1063/10.0023848

其它文件与链接

链接到 Scopus 的出版物

引用此

@article{6369211e84214c2c9a7ccc7221035b42,

title = "Patterning single-layer materials by electrical breakdown using atomic force microscopy",

abstract = "ARTICLE HIGHLIGHTS HIGHLIGHTS • Successful patterning of 2D materials by electrical breakdown. • A maskless, pollution-free method for patterning various 2D materials. • Nanopattern size is characterized by number of voltage scanning cycles.",

keywords = "2D material, AFM, Electrical breakdown, Lithography, Nanopattern",

author = "Yajie Yang and Jiajia Lu and Yanbo Xie and Libing Duan",

note = "Publisher Copyright: {\textcopyright} 2024 2023 Author(s).",

year = "2024",

month = mar,

day = "1",

doi = "10.1063/10.0023848",

language = "英语",

volume = "7",

journal = "Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering",

issn = "1672-6030",

publisher = "American Institute of Physics",

number = "1",

}

TY - JOUR

T1 - Patterning single-layer materials by electrical breakdown using atomic force microscopy

AU - Yang, Yajie

AU - Lu, Jiajia

AU - Xie, Yanbo

AU - Duan, Libing

PY - 2024/3/1

Y1 - 2024/3/1

N2 - ARTICLE HIGHLIGHTS HIGHLIGHTS • Successful patterning of 2D materials by electrical breakdown. • A maskless, pollution-free method for patterning various 2D materials. • Nanopattern size is characterized by number of voltage scanning cycles.

AB - ARTICLE HIGHLIGHTS HIGHLIGHTS • Successful patterning of 2D materials by electrical breakdown. • A maskless, pollution-free method for patterning various 2D materials. • Nanopattern size is characterized by number of voltage scanning cycles.

KW - 2D material

KW - AFM

KW - Electrical breakdown

KW - Lithography

KW - Nanopattern

UR - https://www.scopus.com/pages/publications/85181160661

U2 - 10.1063/10.0023848

DO - 10.1063/10.0023848

M3 - 文章

AN - SCOPUS:85181160661

SN - 1672-6030

VL - 7

JO - Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering

JF - Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering

IS - 1

M1 - 013008

ER -

Patterning single-layer materials by electrical breakdown using atomic force microscopy

摘要

访问文件

其它文件与链接

学术指纹

引用此