Novel resonant micro-opto-electro-mechanical scanning mirror and Lissajous pattern display

Based on the micro-opto-electro-mechanical systems (MOEMS) technology, a new resonant micro scanning mirror is designed and fabricated. It is actuated by electrostatic combs fingers. Base on the employed silicon-on-insulator (SOI) technology the residual stress during the process is used to create vertical offset in comb structures, which is regard as starting electrode. In order to realize their electromechanical characterizations, an optical experimental equipment is established. The results show that the device has advantages such as simple fabrication process, low driving voltage, and large scanning angle. In addition, two one-dimensional micro scanning mirrors are reasonably combined to make many different Lissajous scanning patterns, which agree very well with Matlab simulations.