@inproceedings{079cff441d90422fa5f5b5a3063525a7,
title = "NIR and MIR Absorption of Ultra-Black Silicon (UBS). Application to High Emissivity, All-Silicon, Light Source",
abstract = "We present the Near-Infra-Red (NIR) and Mid-Infrared (MIR) absorption properties of Ultra-Black Silicon obtained by wafer-level cryogenic plasma processing. We found that when using highly-doped silicon, the spectral range of near-unity full absorption of light is extended from the visible range till a wavelength of 10\textbackslash{} \textbackslash{}mu \textbackslash{}mathrm\{m\}. This MIR wavelength range coincides with that of the maximum of black-body radiation from room temperature up to a few thousand Kelvin. Therefore, according to Kirchhoff's Law, we take advantage of the enhanced properties of black silicon to realize ultra-compact light-sources of high efficiency, which are operated in combination with a MEMS-FTIR spectrometer.",
author = "Sreyash Sarkar and Elsayed, \{Ahmed A.\} and Elyes Nefzaoui and Jeremie Drevillon and Philippe Basset and Frederic Marty and Momen Anwar and Yiting Yu and Jiancun Zhao and Xichen Yuan and Zhongzhu Liang and Diaa Khalil and Sabry, \{Yasser M.\} and Tarik Bourouina",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 ; Conference date: 27-01-2019 Through 31-01-2019",
year = "2019",
month = jan,
doi = "10.1109/MEMSYS.2019.8870641",
language = "英语",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "860--862",
booktitle = "2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019",
}