Nanometric displacement sensor with a switchable measuring range using a cylindrical vector beam excited silicon nanoantenna

We demonstrate a nanometric displacement sensor with a switchable measuring range by using a single silicon nanoantenna. It is revealed that the interference between the longitudinal and transverse dipolar scattering can be well tuned by moving the nanoantenna in the focal field of the cylindrical vector beam. As a result, a position related scattering directivity is found and is used as a displacement sensor with a 4.5 nm lateral resolution. Interestingly, the measuring range of this displacement sensor can be extended by twice through simply changing the excitation from the azimuthally polarized beam to the radially polarized beam. Our results provide a facile way to tune the measuring range of the nanometric displacement sensor and may open up an avenue to super-resolution microscopy and optical nanometrology.