Multiple-domain coupling analysis based on lumped parameter macromodel for micromachined gyroscope

The multiple domain of micromachined gyroscope was decomposed into elastic field, electrostatic field and air-damping field. The lumped parameter model for every domain, therefore, was utilized to analyze its coupling effects. With edge-effect considered, the analytical equation between capacitance and displacement was obtained, the damping coefficients and squeeze stiffness coefficients of MEMS structures with perforation holes, the equivalent stiffness and mass were also computed respectively. At last, the system simulation under different conditions was accomplished by inserting the obtained lumped parameter models into a system level simulator.