Micro-structure of multilayer Ir coatings prepared by MOCVD method

Indium tris-acetylacetonate taken as precursor was multi-time deposited on the quartz and PyC substrates by using metal-organic chemical vapor deposition (MOCVD). Finally multilayer Ir coatings were prepared. XRD analysis shows that the iridium coatings present pure polycrystalline phase. After impact fracture test, SEM photographs show that there is no delamination among interfaces of the multilayer coatings and substrates. The defects within the Ir coatings during the deposition process can be sealed perfectly by the subsequent depositions.