Micro-rotating-structures for measuring stresses of thin films

Effects of various geometrical parameters on structural strain-response were modeled with finite element method and theoretically analyzed in detail. Results show that length of both fixed beam and rotating beam, width of the neck and central distance between two necks are all sensitive factors to structural strain-response, but width of both beams and length of the neck are not. So, comprehensive consideration is needed for optimization of structural design. In the end, a table of geometrical parameters which had been adopted in our research is given.