Method for system-level modeling of micromachined inertial sensors

We presented a modeling method based on multi-port-element network (MuPEN) for rapidly performing the system-level mixed-domain simulation of micromachined inertial sensors with interface circuit. With this method, micromachined inertial sensors are divided into many functional components, such as anchors, beams, plates, electrostatic gaps and so on. All components are modeled as parameterized multi-port-elements (MPEs) whose behaviors are evaluated using the rigid body relative movement theory and energy method. Then MPEs are connected together to form a network for representing the system-level model of the micromachined inertial sensors. Using this method, we established component models for spatial beams and comb structures, and then a reusable MPEs library is formed. As an application of the MuPEN method, the system-level model of a micro-gyroscope is established using the MPEs library. Finally, simulation results show that the modal frequencies obtained by MuPEN method agree well with those by finite element analysis, and that the MuPEN method is effective for rapidly performing system-level time-domain simulation.