Key algorithm for MEMS process geometrical simulation based on ACIS

Jing Hui Xu; Wei Zheng Yuan; Hong Long Chang; Jian Bing Xie

Key algorithm for MEMS process geometrical simulation based on ACIS

Jing Hui Xu
, Wei Zheng Yuan
, Hong Long Chang
, Jian Bing Xie

机电学院

Northwestern Polytechnical University Xian

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

An algorithm is explored to MEMS process geometrical simulation by setting 3D models' top surface solids and heights, which can give a good resolution of definition for the relative position among 3D models carried out in MEMS process geometrical simulation. The algorithm is well realized in MEMS process geometrical simulation and indicates that the speed of simulation is much higher than that in systems available now.

源语言	英语
页（从-至）	96-99
页数	4
期刊	Yadian Yu Shengguang/Piezoelectrics and Acoustooptics
卷	29
期	1
出版状态	已出版 - 2月 2007

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title = "Key algorithm for MEMS process geometrical simulation based on ACIS",

abstract = "An algorithm is explored to MEMS process geometrical simulation by setting 3D models' top surface solids and heights, which can give a good resolution of definition for the relative position among 3D models carried out in MEMS process geometrical simulation. The algorithm is well realized in MEMS process geometrical simulation and indicates that the speed of simulation is much higher than that in systems available now.",

keywords = "ACIS, Algorithm, Geometrical simulation, MEMS",

author = "Xu, \{Jing Hui\} and Yuan, \{Wei Zheng\} and Chang, \{Hong Long\} and Xie, \{Jian Bing\}",

year = "2007",

month = feb,

language = "英语",

volume = "29",

pages = "96--99",

journal = "Yadian Yu Shengguang/Piezoelectrics and Acoustooptics",

issn = "1004-2474",

publisher = "Sichuan Institute of Piezoelectric and Acoustooptic Technology",

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T1 - Key algorithm for MEMS process geometrical simulation based on ACIS

AU - Xu, Jing Hui

AU - Yuan, Wei Zheng

AU - Chang, Hong Long

AU - Xie, Jian Bing

PY - 2007/2

Y1 - 2007/2

N2 - An algorithm is explored to MEMS process geometrical simulation by setting 3D models' top surface solids and heights, which can give a good resolution of definition for the relative position among 3D models carried out in MEMS process geometrical simulation. The algorithm is well realized in MEMS process geometrical simulation and indicates that the speed of simulation is much higher than that in systems available now.

AB - An algorithm is explored to MEMS process geometrical simulation by setting 3D models' top surface solids and heights, which can give a good resolution of definition for the relative position among 3D models carried out in MEMS process geometrical simulation. The algorithm is well realized in MEMS process geometrical simulation and indicates that the speed of simulation is much higher than that in systems available now.

KW - ACIS

KW - Algorithm

KW - Geometrical simulation

KW - MEMS

UR - https://www.scopus.com/pages/publications/34047199443

M3 - 文章

AN - SCOPUS:34047199443

SN - 1004-2474

VL - 29

SP - 96

EP - 99

JO - Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

JF - Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

IS - 1

ER -

Key algorithm for MEMS process geometrical simulation based on ACIS

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