TY - JOUR
T1 - Improvement of MEMS gyroscope interface circuit in 0.5 μm CMOS technics
AU - Chen, Fang
AU - Chang, Honglong
AU - Yuan, Weizheng
AU - Zhao, Haitao
PY - 2010/11/20
Y1 - 2010/11/20
N2 - A high precision CMOS interface readout circuit for a capacitive MEMS gyroscope is designed, the influences of the noise and mismatch to the capacitive readout circuit are analyzed theoretically in detail. Based on a continuous time voltage sensing topology, a low-noise charge sensitive amplifier with input and output common feedback circuit is designed, which the input and output common voltage is 2.5 V, and the input noise floor of the amplifier is 9 nV. the carrier wave modulation technique is used to eliminated the flicker noise, the designed interface circuit was simulated in Cadence and an experimental PCB circuit was made accordingly. The result shows that it can not only remove the impacts of most parasitic capacitances and restrain the noise & coupling signals, but also reduce the impacts of offset voltage that comes from mismatch on capacitive resolution, the simulation shows that its capacitance resolution is 0. 13 aF/ √Hz, can satisfied the requirements of navigation-grade and the requirements of navigation-grade.
AB - A high precision CMOS interface readout circuit for a capacitive MEMS gyroscope is designed, the influences of the noise and mismatch to the capacitive readout circuit are analyzed theoretically in detail. Based on a continuous time voltage sensing topology, a low-noise charge sensitive amplifier with input and output common feedback circuit is designed, which the input and output common voltage is 2.5 V, and the input noise floor of the amplifier is 9 nV. the carrier wave modulation technique is used to eliminated the flicker noise, the designed interface circuit was simulated in Cadence and an experimental PCB circuit was made accordingly. The result shows that it can not only remove the impacts of most parasitic capacitances and restrain the noise & coupling signals, but also reduce the impacts of offset voltage that comes from mismatch on capacitive resolution, the simulation shows that its capacitance resolution is 0. 13 aF/ √Hz, can satisfied the requirements of navigation-grade and the requirements of navigation-grade.
KW - Capacitance resolution
KW - CMOS
KW - High precision
KW - Mems gyroscope
UR - https://www.scopus.com/pages/publications/79951495813
U2 - 10.3969/j.issn.1004-1699.2010.11.009
DO - 10.3969/j.issn.1004-1699.2010.11.009
M3 - 文章
AN - SCOPUS:79951495813
SN - 1004-1699
VL - 23
SP - 1560
EP - 1564
JO - Chinese Journal of Sensors and Actuators
JF - Chinese Journal of Sensors and Actuators
IS - 11
ER -