Formation of nano-combi carbon fibers on a planar silicon substrate using (TiO)SO₄ as a catalyst precursor [4]

Formation of nano-combi carbon fibers on a planar silicon substrate using (TiO)SO₄ as a catalyst precursor was investigated. The vapor grown carbon fibers (VGCF) were made by catalyzed chemical vapor deposition (CVD) method under a hydrogen reducing atmosphere. The fibers were found to consist of large amount of nanometer scale carbon honeycombs and were uniform in diameter. Existence of catalyst on the tip of the fibers after cooling confirmed that a liquid catalyst phase played a role in the growth process.