Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope

Energy dissipation contribution of micro-machined Coriolis vibratory gyroscope (MCVG) is modeled, numerically simulated, and experimentally verified in this paper. First, the amount of independent damping dissipation consisting of thermoelastic loss, anchor loss, surface loss, Akhiezer loss, and air damping loss during vibration is obtained by simulation model, PML-based method, and numerical calculation, respectively. Then, temperature and pressure dependence characteristic of the corresponding quality factor (Q) for the MCVG are obtained. Meanwhile, dominant sources of damping dissipation are determined, which paves the way to improve Q. Finally, the temperature-dependent and pressure-dependent characteristics of the total Q are measured with errors of less than 10% and 18% compared with the simulated total Q, respectively, in which accuracy is acceptable for predicting the damping dissipation behavior of MCVG in design stage before high-cost fabrication.