Electrical shielding for silicon nanowire biosensor in microchannels

When integrating silicon nanowire biosensors with a microfluidic sample delivery system, additional challenges are introduced. Noise and erroneous signal generation induced by sample fluidic handling such as flow rate fluctuations during sample switching reduce the quality and reliability of the measurement system. In this paper, we propose an effective electrical shielding method to improve the stability and reliability of the setup by placing double electrodes instead of a single electrode that is traditionally used for nanowire sensors. Experimental results show that with proper shielding electrical measurements are not influenced by flow speed variations or during sample switching.