TY - GEN
T1 - Drive Dependence of Output Amplitude Stabilities in Weakly Coupled MEMS Resonators
AU - Zhang, Hemin
AU - Sun, Jiangkun
AU - Chen, Dongyang
AU - Pandit, Milind
AU - Sobreviela, Guillermo
AU - Seshia, Ashwin
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/10
Y1 - 2019/10
N2 - Amplitude stability is critical for mode-localized sensors with the output metric of such sensors being defined as an amplitude ratio. A systematic study of the drive dependence of the amplitude ratio metric has not been conducted previously. In this paper, we first report that the amplitude stability of the weakly coupled resonators can be improved using a dual-resonator drive method compared to a single-resonator drive method. Experimental validation on a weakly coupled MEMS resonator demonstrates that the normalized amplitude stability can be improved by a mean factor of ~2.9 using the dual-resonator drive method compared to the single-resonator drive method, without any degradation in the frequency stability.
AB - Amplitude stability is critical for mode-localized sensors with the output metric of such sensors being defined as an amplitude ratio. A systematic study of the drive dependence of the amplitude ratio metric has not been conducted previously. In this paper, we first report that the amplitude stability of the weakly coupled resonators can be improved using a dual-resonator drive method compared to a single-resonator drive method. Experimental validation on a weakly coupled MEMS resonator demonstrates that the normalized amplitude stability can be improved by a mean factor of ~2.9 using the dual-resonator drive method compared to the single-resonator drive method, without any degradation in the frequency stability.
KW - amplitude stability
KW - coupled resonators
KW - dual resonator drive
KW - vibration mode localization
UR - https://www.scopus.com/pages/publications/85078704082
U2 - 10.1109/SENSORS43011.2019.8956770
DO - 10.1109/SENSORS43011.2019.8956770
M3 - 会议稿件
AN - SCOPUS:85078704082
T3 - Proceedings of IEEE Sensors
BT - 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 18th IEEE Sensors, SENSORS 2019
Y2 - 27 October 2019 through 30 October 2019
ER -