Diffusion mechanism of Fe-Pd films deposited on TA1

An iron (Fe) film and a palladium (Pd) film were deposited on a pure titanium substrate by using high pure Fe and Pd as target material in a multi-arc ion-plating apparatus. The diffusion heat-treatments were carried out at 700°C-1100°C for 0.5-1 h in vacuum. SEM and XRD were employed to characterize their structure and phase composition. EDS was used to identify their diffusion layer structure. The results show that Fe and Pd form a good alloy in films at 700°C for 0.5 h in vacuum. At 900°C for 1 h, there is a Fe-Pd phase, but titanium of substrate diffuses to surface of Fe-Pd films. At temperature > 900°C for time > 1 h, there is a bad Fe-Pd alloy film.