@inproceedings{267fa79913624dd0a799426a1b2bf76b,
title = "Design, Processing and Assembly of Fabry-Perot Sensing Diaphragm in EFPI Ultrasonic Sensor for PD Detection in Transformer",
abstract = "Partial discharge (PD) detection is an important method to evaluate the insulation state of oil-paper insulation in transformer. In order to detect the ultrasonic signals induced by PD in transformer with an internal sensor, this paper proposed an extrinsic Fabry- Perot interference (EFPI) ultrasonic sensor, which was based on the beam-supported sensing diaphragm. The relationship between the parameters of the EFPI ultrasonic sensor and the geometric size of sensing diaphragm was simulated, thus the determining order of the geometric parameters was clarified. Meanwhile, the micro-electromechanical system (MEMS) based manufacturing process of the sensing diaphragm was presented, and the packaging of the Fabry- Perot cavity was improved by utilizing the dustproof and waterproof sound-permeable diaphragm and the transducer structure. The proposed EFPI ultrasonic sensor was able to work stably in oil environment.",
keywords = "Beam-supported sensing diaphragm, EFPI, MEMS, Partial discharge, Ultrasonic signal",
author = "Heli Ni and Xiaowei Pan and Lihong Gu and Yiting Yu and Wenrong Si",
note = "Publisher Copyright: {\textcopyright} 2023, Beijing Paike Culture Commu. Co., Ltd.; 17th Annual Conference of China Electrotechnical Society, CES 2022 ; Conference date: 17-09-2022 Through 18-09-2022",
year = "2023",
doi = "10.1007/978-981-99-0451-8\_43",
language = "英语",
isbn = "9789819904501",
series = "Lecture Notes in Electrical Engineering",
publisher = "Springer Science and Business Media Deutschland GmbH",
pages = "430--439",
editor = "Jian Li and Kaigui Xie and Jianlin Hu and Qingxin Yang",
booktitle = "The Proceedings of the 17th Annual Conference of China Electrotechnical Society",
}