@inproceedings{ddce1d80ec164f7dace647f7e5f806ca,
title = "Design and optimization of a micro piezoresistive pressure sensor",
abstract = "This paper focuses the structural design and optimisation of the micro piezoresistive pressure sensor to enhance the sensitivity and linearity. Finite element method (FEM) is adopted to optimize the sensor parameters, such as the resistor location and number of turns. An absolutely type pressure sensor with 150kPa full scale span (FSS) is built based on the optimal design programme as well as the bulkmicromachined process. For an 1150-μm-wide 30-μm-thick square-shape pressure sensor, experimental results show that the sensitivity of 2.3mV/V/10kPa, linearity error of 0.57\% FSS and pressure hysteresis of 0.04\% FSS are achieved. The well compatibility between the results of simulation and testing certifies the validitv of the ontimized scheme.",
keywords = "Finite element analysis (FEA), Linearity, Optimization, Piezoresistive pressure sensor (PZR pressure sensor), Sensitivity",
author = "Shuang Chen and Zhu, \{Ming Quan\} and Ma, \{Bing He\} and Yuan, \{Wei Zheng\}",
year = "2008",
doi = "10.1109/NEMS.2008.4484350",
language = "英语",
isbn = "9781424419081",
series = "3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS",
pages = "351--356",
booktitle = "3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008",
note = "3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 ; Conference date: 06-01-2008 Through 09-01-2008",
}