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Design and fabrication of a vortex inertial sensor consisting of 3-DOF gyroscope and 3-DOF accelerometer

  • Northwestern Polytechnical University Xian

科研成果: 书/报告/会议事项章节会议稿件同行评审

12 引用 (Scopus)

摘要

This paper reports a novel vortex multi-axis inertial sensor, which can detect three components of angular rate and three components of linear acceleration simultaneously. It uses a vortex gas flow instead of the traditional linear gas flow as the inertial mass to detect the angular rate and linear acceleration. In the implementation, the vortex was formed by jetting the gas into a round chamber through two opposing nozzle orifices in the opposite direction. And the multi-axis detection was realized by a proper configuration of thermistors. The test results show that both the gyroscopes and accelerometers can reach a medium accuracy, which proves the feasibility of the device.

源语言英语
主期刊名2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
551-554
页数4
DOI
出版状态已出版 - 2012
活动2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, 法国
期限: 29 1月 20122 2月 2012

出版系列

姓名Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

会议

会议2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
国家/地区法国
Paris
时期29/01/122/02/12

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