TY - GEN
T1 - Deposition phase diagrams for chemical vapor deposition of BCl 3-CH4-H2 system
AU - Liu, Shanhua
AU - Zhang, Litong
AU - Liu, Yongsheng
AU - Cheng, Laifei
AU - Yin, Xiaowei
AU - Zeng, Qingfeng
PY - 2010
Y1 - 2010
N2 - Based on the minimization of the Gibbs free energy of the reaction system, applying the FactSage Thermodynamic Software, the phase diagrams of BCl 3-CH4-H2 system were calculated. The effect of partial pressure of reactants, total pressures, and deposition temperatures on the phase diagrams was well explained by corresponding law. Optimization of process parameters for a desired deposition could be established from the phase diagrams.
AB - Based on the minimization of the Gibbs free energy of the reaction system, applying the FactSage Thermodynamic Software, the phase diagrams of BCl 3-CH4-H2 system were calculated. The effect of partial pressure of reactants, total pressures, and deposition temperatures on the phase diagrams was well explained by corresponding law. Optimization of process parameters for a desired deposition could be established from the phase diagrams.
UR - https://www.scopus.com/pages/publications/77955567446
U2 - 10.1002/9780470909836.ch4
DO - 10.1002/9780470909836.ch4
M3 - 会议稿件
AN - SCOPUS:77955567446
SN - 9780470889367
T3 - Ceramic Transactions
SP - 41
EP - 47
BT - Design, Development, and Applications of Engineering Ceramics and Composites - A Collection of Papers Presented at the 8th Pacific Rim Conference on Ceramic and Glass Technology, PACRIM 8
PB - American Ceramic Society
T2 - 8th Pacific Rim Conference on Ceramic and Glass Technology, PACRIM-8
Y2 - 31 May 2009 through 5 June 2009
ER -