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Computer-aided NC programming system for large scale and off-axis aspheric optics in parallel grinding

  • L. Zhou
  • , Q. C. Wei
  • , S. J. Zhao
  • , Q. H. Zhang
  • , J. Wang
  • , Q. Xu

科研成果: 书/报告/会议事项章节会议稿件同行评审

3 引用 (Scopus)

摘要

For the purpose of ultra-precision grinding large scale and complex off-axis aspheric optics effectively and automatically, computer-aided NC programming system was developed in this article. First the mathematical model of aspheric parallel grinding was analyzed, and the manufacture process of aspheric grinding is designed. Then the system architecture was established, which included initial grinding module, on-machine measuring module and error compensation grinding module. After inputting process and aspheric parameters, the system could calculate the grinding wheel X/Z/Y coordinates precisely and simulate the grinding pathway automatically, and then create grinding CNC program, which could control the grinding wheel to move along the aspheric surface. And the on-machine measurement CNC program was created to acquire the form error by displacement sensor. By combining the form error with the aspheric surface coordinates, the grinding wheel coordinates could be calculated and compensation machining CNC program was created. Using this system to manufacturing one large scale and off-axis aspheric optics, the PV of final form error was below 3.0μm, and the RMS was below 0.5μm.

源语言英语
主期刊名9th International Symposium on Advanced Optical Manufacturing and Testing Technologies
主期刊副标题Subdiffraction-Limited Plasmonic Lithography and Innovative Manufacturing Technology
编辑Xiaoliang Ma, Mingbo Pu, Xiong Li, Rui Zhou, Xuanming Duan, Xiangang Luo
出版商SPIE
ISBN(电子版)9781510623262
DOI
出版状态已出版 - 2019
已对外发布
活动9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-Limited Plasmonic Lithography and Innovative Manufacturing Technology, AOMATT 2018 - Chengdu, 中国
期限: 26 6月 201829 6月 2018

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
10842
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-Limited Plasmonic Lithography and Innovative Manufacturing Technology, AOMATT 2018
国家/地区中国
Chengdu
时期26/06/1829/06/18

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