Comparison and analysis of two design criteria of ring array micro deformable mirror

The design of ring array micro deformable mirror makes it possible to utilize every segment sufficiently in the wavefront correcting. The ring array micro deformable mirror has two design criteria-the equal segment area and the equal segment width. Taking the ring array micro deformable mirror of thirty-seven segments for example, the two design criteria were compared in the terms of the wavefront fitting error and the residual wavefront Strehl ratio after correction. The results show that the performance of ring array micromirror of the equal segment area is better than that of ring array micromirror of the equal segment width, especially when the wavefront is distorted seriously.