CMOS-compatible lithium-ion batteries for distributed on-chip power architecture

Complementary metal-oxide-semiconductor (CMOS)-compatible energy storage batteries with distributed on-chip power supply capability are essential for the development of advanced system-on-chips (SoCs). However, such devices have not been reported till now. The current concentrated power architecture of SoCs based on a discrete battery, with redundant encapsulation materials and tabs, exhibits low energy storage density, energy utilization efficiency, and integration capability. Herein, CMOS-compatible lithium-ion batteries (CLIBs) are developed for distributed on-chip power supply in SoCs. The anode and cathode are prepared on two different wafers, which are bonded with electrolytes and separators to form the CLIBs. The CLIBs exhibit an areal capacity of 3.54 mAh cm⁻² and energy density of 34.375 mWh cm⁻³ at 0.1C and simplify the integration of a multi-sensor SoC with through-silicon vias and redistribution layer circuits. Further, the dual-CLIB distributed power architecture exhibits nearly doubled energy utilization efficiency as compared to the centralized power architecture.