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Broadband energy harvesting using a nonlinear 2DOF MEMS electret power generator

  • K. Tao
  • , J. Wu
  • , L. H. Tang
  • , N. Wang
  • , S. W. Lye
  • , J. M. Miao
  • Nanyang Technological University
  • The University of Auckland

科研成果: 书/报告/会议事项章节会议稿件同行评审

5 引用 (Scopus)

摘要

This paper presents the modeling and experimental results of a novel nonlinear 2-degree-of-freedom (2DOF) MEMS electret power generator for broadband energy harvesting. The proposed 2DOF resonant system that comprises a primary and an accessory mass is constructed on a silicon wafer by double-side DRIE process. Two close resonances with frequency ratio of only 1.24 (590 Hz and 731 Hz) and comparable magnitudes are achieved for the first time for a 2DOF MEMS device. With further increasing the excitation, hardening nonlinearity induced by end-stop effect is engaged, resulting in resonant frequency drift upwards and further bandwidth convergence. The outcome of the work offers a promising wideband approach by combined advantages of both multi-modal and nonlinear mechanisms.

源语言英语
主期刊名MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
出版商Institute of Electrical and Electronics Engineers Inc.
1236-1239
页数4
ISBN(电子版)9781509019731
DOI
出版状态已出版 - 26 2月 2016
已对外发布
活动29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, 中国
期限: 24 1月 201628 1月 2016

出版系列

姓名Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2016-February
ISSN(印刷版)1084-6999

会议

会议29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
国家/地区中国
Shanghai
时期24/01/1628/01/16

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