A three-dimensional electret-based micro power generator for low-level ambient vibrational energy harvesting

A novel three-dimensional (3D) electret-based micro power generator with multiple vibration modes has been developed, which is capable of converting low-level ambient kinetic energy to electrical energy. The device is based on a rotational symmetrical resonator which consists of a movable disc-shaped seismic mass suspended by three sets of spiral springs. Experimental analysis shows that the proposed generator operates at an out-of-plane direction at mode I of 66 Hz and two in-plane directions at mode II of 75 Hz and mode III of 78.5 Hz with a phase difference of about 90°. A corona localized charging method is also proposed that employs a shadow mask and multiple discharge needles for the production of micro-sized electret array. From tests conducted at an acceleration of 0.05 g, the prototype can generate a maximum power of 4.8 nW, 0.67 nW and 1.2 nW at vibration modes of I, II and III, respectively. These values correspond to the normalized power densities of 16μW cm^-3 g^-2, 2.2μW cm^-3 g^-2 and 4μW cm ^-3 g^-2, respectively. The results show that the generator can potentially offer an intriguing alternative for scavenging low-level ambient energy from 3D vibration sources.