A simple numerical method to study the far-field diffraction of optical MEMS devices with a large array and complex element geometry

A simple numerical method based on MATLAB (The MathWorks, Inc.) is presented for studying the far-field diffraction of some optical MEMS devices with a large array and complex element geometry. The method avoids the theoretical solution by defining the working surfaces according to different apertures. Through a practical example of a grating optical modulator, the experimental tests are in good agreement with the simulation performed by using the proposed method. Then, some other optical MEMS devices with different structure configurations are also simulated. All these results reveal that the method proposed is efficient and effective, yet easy to operate. It is extremely suitable for simulating and analyzing such optical MEMS devices with planar reflective or transmissive optical working surfaces.