摘要
This paper presents a systematic multivariate process capability index (MPCI) method, which may provide references for assuring and improving process quality levels while achieving an overall evaluation of process quality. The system method includes a spatial MPCI model for multivariate normal distribution data, MPCI model based on factor weight for multivariate no-normal distribution application, and MPCI model based on yield for yield application. At last, examples for calculating MPCI are given, and the experimental results show that this systematic method is effective and practical.
| 源语言 | 英语 |
|---|---|
| 文章编号 | 016001 |
| 期刊 | Journal of Semiconductors |
| 卷 | 32 |
| 期 | 1 |
| DOI | |
| 出版状态 | 已出版 - 1月 2011 |
指纹
探究 'A multivariate process capability index model system' 的科研主题。它们共同构成独一无二的指纹。引用此
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver