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A multivariate process capability index model system

  • Northwestern Polytechnical University Xian

科研成果: 期刊稿件文章同行评审

1 引用 (Scopus)

摘要

This paper presents a systematic multivariate process capability index (MPCI) method, which may provide references for assuring and improving process quality levels while achieving an overall evaluation of process quality. The system method includes a spatial MPCI model for multivariate normal distribution data, MPCI model based on factor weight for multivariate no-normal distribution application, and MPCI model based on yield for yield application. At last, examples for calculating MPCI are given, and the experimental results show that this systematic method is effective and practical.

源语言英语
文章编号016001
期刊Journal of Semiconductors
32
1
DOI
出版状态已出版 - 1月 2011

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