TY - GEN
T1 - A mode-localized accelerometer based on three degree-of-freedom weakly coupled resonator
AU - Kang, Hao
AU - Yang, Jing
AU - Zhong, Jiming
AU - Zhang, Heming
AU - Chang, Honglong
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/12/21
Y1 - 2017/12/21
N2 - This paper reports a micromachined accelerometer using a three degree-of-freedom (3-DoF) weakly coupled resonator (WCR) based on the phenomenon of mode localization. When acceleration acts on the proof masses, the stiffness imbalance between the two outer resonators will incur the mode localization and cause the shift of amplitude ratio. The measured amplitude ratio sensitivity of 7,263,30 ppm/g is 726 times higher than the frequency sensitivity of 10,00 ppm/g. Furthermore, the sensitivity of the 3-DoF WCR accelerometer is improved by 349% compared with the 2-DoF WCR accelerometer.
AB - This paper reports a micromachined accelerometer using a three degree-of-freedom (3-DoF) weakly coupled resonator (WCR) based on the phenomenon of mode localization. When acceleration acts on the proof masses, the stiffness imbalance between the two outer resonators will incur the mode localization and cause the shift of amplitude ratio. The measured amplitude ratio sensitivity of 7,263,30 ppm/g is 726 times higher than the frequency sensitivity of 10,00 ppm/g. Furthermore, the sensitivity of the 3-DoF WCR accelerometer is improved by 349% compared with the 2-DoF WCR accelerometer.
KW - mode localization
KW - resonant accelerometer
KW - three degree-of-freedom
KW - weakly coupled resonator
UR - https://www.scopus.com/pages/publications/85044265577
U2 - 10.1109/ICSENS.2017.8234065
DO - 10.1109/ICSENS.2017.8234065
M3 - 会议稿件
AN - SCOPUS:85044265577
T3 - Proceedings of IEEE Sensors
SP - 1
EP - 3
BT - IEEE SENSORS 2017 - Conference Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 16th IEEE SENSORS Conference, ICSENS 2017
Y2 - 30 October 2017 through 1 November 2017
ER -