TY - GEN
T1 - A Miniature Spot Position Detector Based on a Resonant Calorimeter for the Micro-Sized Spot
AU - Quan, Aojie
AU - Wang, Chen
AU - Zhang, Hemin
AU - Guan, Yangyang
AU - Li, Chengxin
AU - Wang, Chenxi
AU - Kraft, Michael
N1 - Publisher Copyright:
© 2024 IEEE.
PY - 2024
Y1 - 2024
N2 - In this study, we introduce an innovative method for continuously tracking the positions of small laser spots using a resonant calorimeter. The detectable heat generated by the laser spot varies with its distribution on the proposed device. We first analyze the device's sensitivity with varying structural parameters using finite element analysis (FEA) and subsequently fabricate and measure the optimized design. Our findings indicate that the resonant frequency of the calorimeter exhibits a linear relationship with the 2 μm-sized laser spot position along with the resonator beam, covering a range from 0 to 100 μm. Remarkably, we achieve an impressive spot position noise floor as low as 2 nm/√Hz, within a 95 dB dynamic range.
AB - In this study, we introduce an innovative method for continuously tracking the positions of small laser spots using a resonant calorimeter. The detectable heat generated by the laser spot varies with its distribution on the proposed device. We first analyze the device's sensitivity with varying structural parameters using finite element analysis (FEA) and subsequently fabricate and measure the optimized design. Our findings indicate that the resonant frequency of the calorimeter exhibits a linear relationship with the 2 μm-sized laser spot position along with the resonator beam, covering a range from 0 to 100 μm. Remarkably, we achieve an impressive spot position noise floor as low as 2 nm/√Hz, within a 95 dB dynamic range.
KW - Laser spot position detection
KW - low noise
KW - self-oscillation
KW - sensitivity optimization
UR - https://www.scopus.com/pages/publications/85186658848
U2 - 10.1109/MEMS58180.2024.10439469
DO - 10.1109/MEMS58180.2024.10439469
M3 - 会议稿件
AN - SCOPUS:85186658848
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 987
EP - 990
BT - IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024
Y2 - 21 January 2024 through 25 January 2024
ER -