TY - GEN
T1 - A micro resonant electrometer with 9-electron charge resolution in room temperature
AU - Yang, Jing
AU - Kang, Hao
AU - Chang, Honglon
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/4/24
Y1 - 2018/4/24
N2 - This paper reports a mode-localized resonant electrometer with 9-electron charge resolution in room temperature. To the best knowledge of the authors, it is the highest resolution level for MEMS resonant electrometers. It uses a 3 degree-of-freedom (DoF) weakly coupled resonators (WCRs) as sensing element, then input charge causes stiffness perturbation to one resonator and leads to a drastic change of the mode shape owing to the mode localization phenomenon. Under the closed-loop test, the relative sensitivity based on the amplitude ratios (2280858ppm) is -900 times higher than that of the frequency (2539ppm) with the input charge of 380/C. The resolution of the electrometer is 9.21 e/√Hz. Compared to the state-of-the-art MEMS resonant electrometer (5250e/√Hz) [1], the resolution is improved by nearly three orders of magnitude.
AB - This paper reports a mode-localized resonant electrometer with 9-electron charge resolution in room temperature. To the best knowledge of the authors, it is the highest resolution level for MEMS resonant electrometers. It uses a 3 degree-of-freedom (DoF) weakly coupled resonators (WCRs) as sensing element, then input charge causes stiffness perturbation to one resonator and leads to a drastic change of the mode shape owing to the mode localization phenomenon. Under the closed-loop test, the relative sensitivity based on the amplitude ratios (2280858ppm) is -900 times higher than that of the frequency (2539ppm) with the input charge of 380/C. The resolution of the electrometer is 9.21 e/√Hz. Compared to the state-of-the-art MEMS resonant electrometer (5250e/√Hz) [1], the resolution is improved by nearly three orders of magnitude.
UR - https://www.scopus.com/pages/publications/85047020421
U2 - 10.1109/MEMSYS.2018.8346484
DO - 10.1109/MEMSYS.2018.8346484
M3 - 会议稿件
AN - SCOPUS:85047020421
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 67
EP - 70
BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Y2 - 21 January 2018 through 25 January 2018
ER -