A fast and efficient method for permittivity measurement of thin-film material

A fast and efficient method is proposed in this letter to characterize the dielectric permittivity of thin-film materials. The measuring system is based on a TE₁₀₃ rectangular split-cavity resonator operating at around 10 GHz, which has the advantage of providing nondestructive measurements while maintaining a high level of accuracy. The thin-film materials under test can be directly inserted in the split without being processed in a specific shape. Different dielectric materials are tested using this method. And the theoretical derivations and experimental measurements have been performed to confirm the validity and effectiveness of this approach.