A 3D solid modeling oriented MEMS design approach

Driven by the "What You See Is What You Get" design concept,this paper presents a 3D solid modeling oriented MEMS design approach which ensures a design flow from 3D solid model to system-level model and process layout. In this design flow,the 3D solid model is firstly constructed,after FEA simulation, the system-level model can be obtained via component mapping and macro-model extraction, also obtained is the layout through automatic layout conversion. This design approach enhances the design efficiency, and the consistency and accuracy of model data can be assured.