TY - GEN
T1 - 5-Bit Spiral Distributed RF MEMS Phase Shifter
AU - Tian, Wenchao
AU - Zhang, Yuting
AU - Li, Mengjuan
AU - Xie, Zhongliang
AU - Li, Wenhua
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/7
Y1 - 2019/7
N2 - A new spiral distributed radio frequency micro-electromechanical system (RF MEMS) phase shifter which uses 31 MEMS switches to achieve 5-bit phase shifts is designed in this paper. The area of the phase shifter is 2.6×2.6 mm2. The simulation results of phase shift are 11.43°, 23.04°, 44.53°, 91.73° and 182.65° when the central operating frequency is 40 GHz. The deviations of the design target are 0.18°, 0.54°, 0.47°, 1.73° and 2.65°, respectively. Insertion loss and return loss are -15.1092 dB/-8.9120 dB, -14.2271 dB/-9.9053 dB, -15.1092 dB/-8.9120 dB, -13.2439 dB/-11.6679 dB and -16.3046 dB/-10.2057dB, respectively. The simulation results and phase shift accuracy of the 31 phase shifts of RF MEMS phase shifter are given, and the deviation of the design target is within 3.72°. It realizes the requirements of RF MEMS phased array system. This phase shifter has the advantages of high frequency, small size, high precision, low loss and low cost.
AB - A new spiral distributed radio frequency micro-electromechanical system (RF MEMS) phase shifter which uses 31 MEMS switches to achieve 5-bit phase shifts is designed in this paper. The area of the phase shifter is 2.6×2.6 mm2. The simulation results of phase shift are 11.43°, 23.04°, 44.53°, 91.73° and 182.65° when the central operating frequency is 40 GHz. The deviations of the design target are 0.18°, 0.54°, 0.47°, 1.73° and 2.65°, respectively. Insertion loss and return loss are -15.1092 dB/-8.9120 dB, -14.2271 dB/-9.9053 dB, -15.1092 dB/-8.9120 dB, -13.2439 dB/-11.6679 dB and -16.3046 dB/-10.2057dB, respectively. The simulation results and phase shift accuracy of the 31 phase shifts of RF MEMS phase shifter are given, and the deviation of the design target is within 3.72°. It realizes the requirements of RF MEMS phased array system. This phase shifter has the advantages of high frequency, small size, high precision, low loss and low cost.
UR - https://www.scopus.com/pages/publications/85081055541
U2 - 10.1109/NANO46743.2019.8993952
DO - 10.1109/NANO46743.2019.8993952
M3 - 会议稿件
AN - SCOPUS:85081055541
T3 - Proceedings of the IEEE Conference on Nanotechnology
SP - 94
EP - 98
BT - 19th IEEE International Conference on Nanotechnology, NANO 2019
PB - IEEE Computer Society
T2 - 19th IEEE International Conference on Nanotechnology, NANO 2019
Y2 - 22 July 2019 through 26 July 2019
ER -