TY - GEN
T1 - 3D Cone-Shape Carbon Electrode Array for High-Fidelity Ecog Acquisition
AU - Wang, Xuanqi
AU - You, Xiaoli
AU - Yang, Yong
AU - Li, Shouyan
AU - Zhang, Yu
AU - Yu, Quetao
AU - Cao, Chenfei
AU - Yue, Feng
AU - Chang, Honglong
AU - Ji, Bowen
N1 - Publisher Copyright:
© 2026 IEEE.
PY - 2026
Y1 - 2026
N2 - This work presents a three-dimensional cone-shaped carbon neural electrode array that achieves non-invasive, self-adaptive contact with the cortical surface. Using the ultraviolet laser processing, 3D conical microelectrodes and interconnects are patterned directly on a soft PDMS substrate, forming a conformal, mechanically compliant interface that enhances electrocorticography (ECoG) quality. The precise control of laser parameters enables tuning of cone height, thereby modulating cathodic charge storage capacity and impedance by multiple folds. To assess in vivo performance, 2D and 3D electrodes were implanted in the contralateral primary motor cortex (M1) of a rabbit and recorded simultaneously using a dual-array acquisition system. The 16-ch 3D electrodes exhibited impedance up to two orders of magnitude lower than that of 2D electrodes, together with higher amplitudes and reduced inter-trial variability. This soft 3D carbon electrode array provides a tissue-matched neural interface for robust, high-fidelity ECoG acquisition.
AB - This work presents a three-dimensional cone-shaped carbon neural electrode array that achieves non-invasive, self-adaptive contact with the cortical surface. Using the ultraviolet laser processing, 3D conical microelectrodes and interconnects are patterned directly on a soft PDMS substrate, forming a conformal, mechanically compliant interface that enhances electrocorticography (ECoG) quality. The precise control of laser parameters enables tuning of cone height, thereby modulating cathodic charge storage capacity and impedance by multiple folds. To assess in vivo performance, 2D and 3D electrodes were implanted in the contralateral primary motor cortex (M1) of a rabbit and recorded simultaneously using a dual-array acquisition system. The 16-ch 3D electrodes exhibited impedance up to two orders of magnitude lower than that of 2D electrodes, together with higher amplitudes and reduced inter-trial variability. This soft 3D carbon electrode array provides a tissue-matched neural interface for robust, high-fidelity ECoG acquisition.
KW - 3D cone shape
KW - Carbon electrode array
KW - ECoG acquisition
KW - Laser microfabrication
KW - Tissue-matched interface
UR - https://www.scopus.com/pages/publications/105041758711
U2 - 10.1109/MEMS64181.2026.11419588
DO - 10.1109/MEMS64181.2026.11419588
M3 - 会议稿件
AN - SCOPUS:105041758711
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 219
EP - 222
BT - 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026
Y2 - 25 January 2026 through 29 January 2026
ER -