Abstract
This paper reports an ultra-soft neural probe with a temporary high-strength U-section coating of polyethylene glycol (PEG) for the first time. Its fabrication is compatible with MEMS processes, and an ultrathin U-section coating over the probe's back and sidewall is precisely formed by spinning and cold laser cutting. With this novel coating, the probe has both minimized cross-sectional area and sufficient mechanical strength for low-invasive penetration into the brain. Besides, the remained ultra-soft deformable probe after PEG dissolution is expected to be the next generation of neural implants for chronic recording.
| Original language | English |
|---|---|
| Pages (from-to) | 762-766 |
| Number of pages | 5 |
| Journal | IEEJ Transactions on Electrical and Electronic Engineering |
| Volume | 19 |
| Issue number | 5 |
| DOIs | |
| State | Published - May 2024 |
Keywords
- U-section coating
- picosecond laser cutting
- ultra-soft neural probe