@inproceedings{d9e56d9a23f14d6f96123af7537320c8,
title = "Ultra-Soft Neural Probe with a Temporary High-Strength U-Section Coating by Picosecond Laser Micromachining",
abstract = "This paper reports an ultra-soft neural probe with a temporary high-strength U-section coating of polyethylene glycol (PEG) for the first time. Its fabrication is compatible with MEMS processes, and an ultrathin U-section coating over the probe's back and sidewall is precisely formed by spinning and cold laser cutting. With this novel coating, the probe has both minimized cross-sectional area and sufficient mechanical strength for low-invasive penetration into brain. Besides, the remained ultra-soft deformable probe after PEG dissolution is expected to be the next generation of neural implant for chronic recording.",
keywords = "Picosecond Laser Cutting, U-section Coating, Ultra-soft Neural Probe",
author = "Fanqi Sun and Xiaoli You and Yuhao Zhou and Minghao Wang and Mengfei Xu and Xichen Yuan and Honglong Chang and Jingquan Liu and Bowen Ji",
note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",
year = "2023",
language = "英语",
series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "322--325",
booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
}