Tribological properties of sol-gel ZrO₂ thin films

ZrO₂ thin film on Si (100) substrate was prepared with sol-gel process followed by sintering at 550°C. The friction behavior of the film in sliding against AISI 52100 steel or Si₃ N₄ ball was investigated with an one-way reciprocating friction tester. The microstructure, morphology and wear mechanism of the film were studied by X-ray photoelectron spectrometry, atomic force microscopy and scanning electron microscopy. The results show that the film shows excellent antiwear and friction-reducing behavior at a relatively low load (0.5 N), though the antiwear life of the film decreases greatly with increasing load and sliding speed. The wear of the film at a relatively low load is characterized by slight scuffing, while that at a relatively high load and sliding speed characterized by severe plastic deformation, scuffing and spalling.