Towards surface integrity regulation in machining of ceramic matrix composites: Evolution from single to multiple energy field coupling

Ceramic matrix composites (CMCs), by virtue of their exceptional combination of high-temperature resistance, low density, and high strength, have become critical materials in fields such as aerospace and semiconductors. However, their inherent multiphase heterogeneous structure and anisotropy cause conventional mechanical machining to fall into a physical dilemma of uncontrollable stress-induced damage and degraded surface integrity. Therefore, centered on the regulation of surface integrity, this review systematically traces and deeply deconstructs the evolutionary pathway of energy field machining technologies for CMCs, revealing a profound paradigm revolution from passive stress-induced removal to active energy regulation. Specifically, the single mechanical energy field exposes the intrinsic limitations of macroscopic disordered brittle fracture; the vibro-mechanical energy field achieves dimensional reduction and containment of microcracks through high-frequency dynamic intervention; the thermo-mechanical energy field triggers quasi-plastic micro-separation via localized thermal softening; and ultimately, the thermo-vibro-mechanical composite energy field reaches the physical pinnacle of surface integrity regulation through the highest-dimensional spatiotemporal synergy. By systematically examining surface morphology, roughness, and subsurface damage, this review demonstrates the intrinsic mechanisms by which energy field regulation drives material removal from random fracture to controlled separation. Furthermore, the study distills the paradigm shift into a three-fold systematic leap: The evolution of energy action modes from single continuous inputs to multi-field spatiotemporal programming, the evolution of material removal mechanisms from brittle fracture to micro-scale controlled failure, and the evolution of core processing objectives from geometric shaping to active performance empowerment. Finally, this review anticipates future research directions, including the deepening of multi-field coupling mechanisms, the exploration of novel energy carriers, intelligent process decision-making, and the integrated leap of manufacturing capabilities, aiming to provide cutting-edge theoretical support and technical references for the precision machining of critical components in extreme environments.